Cantilever magnetic force sensor for magnetic force microscopy having a magnetic probe coated with a hard-magnetic material

摘要

A magnetic force sensor for detecting a magnetic force of a magnetic sample having a given magnetization direction comprises a magnetic probe having a tip portion. The tip portion is coated with a film of hard- magnetic material effective to maintain the magnetization direction of the probe constant and parallel to the given magnetization direction of the sample. A biasing member has the magnetic probe attached thereto at a free end thereof and is resiliently deflectable in response to the magnetic force between the magnetic probe and the magnetic sample. When the magnetic probe is scanned across the magnetic sample, the distribution of the magnetic force on the magnetic sample is effectively detected.