Surfacing surface process manner of thin film magnetic head and processed detection component null for surfacing surface processing position measurement of thin film magnetic

摘要

PURPOSE: To obtain a machining detecting element for measuring accurately the position in machining in the case where the flying surface of a thin-film magnetic head is machined and a machining method thereof. ;CONSTITUTION: A machining detecting element 1 is constituted of a plurality of resistance elements. Each resistance element is constituted of a variable resistor and a fixed resistor formed by machining when machining a flying surface and connected in parallel. Besides, the resistance elements are arranged at a proper pitch in the depth direction of machining of the flying surface. This makes it possible to detect the amount of machining of the flying surface as a change in resistance. Moreover, the relationship between the position of the depth of machining of the flying surface and the resistance value of the machining detecting element is determined by using values of initial resistance before the start of machining and final resistance after all of the variable resistors are cut off, and based on this relationship, highly accurate machining of the flying surface of a thin-film magnetic head is carried out.;COPYRIGHT: (C)1996,JPO