METHOD FOR MEASURING DOSE OF ELECTRON BEAM AND DEVICE FOR ELECTRON BEAM IRRADIATION TREATMENT

摘要

PROBLEM TO BE SOLVED: To precisely measure the dose of an electron beam outputted from an electron beam(EB) tube and to adjust the dose of the electron beam radiated onto an object to a constant value under control.;SOLUTION: A device for measuring the dose of an electron beam, that consists of a current detecting component 11a and a current measuring component 11b, is placed near the outside of a window 1b of the EB tube 1. The surface of the current detecting component 11a, which is composed of a conductor or a semiconductor, is coated with an insulant coating of a prescribed thickness. Some electrons in the electron beam emitted from the window 1d of the EB tube 1 are caught by the current detecting component 11a to generate a current in it. The generated current is sent from the current measuring component 11b to a controlling component 12, for example, which adjusts the dose of the electron beam emitted from the EB tube 1 to a constant value under control by controlling a filament power source 3. Since a conductor or a semiconductor coated with an insulating film is used as the current detecting component 11a, the dose of the electron beam outputted from the EB tube 1 can be measured precisely, without being affected by a suspended electric charge near the current detecting component 11a.;COPYRIGHT: (C)2001,JPO