SIGNAL DETECTING METHOD BY SCANNING PROBE AND SIGNAL DETECTION DEVICE AND/OR ATOMIC FORCE MICROSCOPE WITH SIGNAL DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the influence of the floating capacity between wiring and substrate ground, and to improve the S/N ratio of a probe signal by applying a natural carrier to a plurality of probes, by referring to the carrier for demodulating a signal, and by processing the signal by the same detection circuit. ;SOLUTION: In an AFM(atomic force microscope), natural carriers ω1, ω2, ...ωn, are applied to each of probes 1011, 1012, ...101n of a multi probe 101 by a carrier application circuit 102. A sample 100 to be observed is driven by an XYZ stage 105 in a vertical direction for bringing into contact with the multi probe 101. After that, the sample 100 is scanned by the XYZ stage 105 in a surface direction. Then, by applying the carrier, current signals i1, i2, ...i3 are synthesized to a synthesis current signal I at the input part of a signal detection circuit 103 for converting to a voltage signal VOUT, the carrier of each probe being used in a carrier application circuit 102 is referred to by a detection circuit 104, and a signal with a desired amount of deflection is detected.;COPYRIGHT: (C)2001,JPO