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TRANSMISSION ELECTRON MICROSCOPE OBSERVATION SAMPLE PREPARING METHOD FOR SOLID PHASE REACTIVE SAMPLE AND CHARGED PARTICLE BEAM DEVICE
TRANSMISSION ELECTRON MICROSCOPE OBSERVATION SAMPLE PREPARING METHOD FOR SOLID PHASE REACTIVE SAMPLE AND CHARGED PARTICLE BEAM DEVICE
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机译:固相反应样品和带电粒子束装置的透射电镜观察样品制备方法
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摘要
PROBLEM TO BE SOLVED: To provide a transmission electron microscope observation sample preparing method for a solid phase reactive sample and a charged particle beam device. SOLUTION: In this transmission electron microscope observation sample preparing method, for working a transmission electron microscope observation sample concerned with a solid phase reaction with convergent charged particle beams, a small thermocouple is fixed to the observation site of the sample by means of reactive gas emission accompanied with charged particle beam irradiation, a temperature and a charged particle image of the observation site is observed with the sample heated, cooling gas is blown to the sample for freezing the high temperature condition when a predetermined temperature or a reaction condition is attained, and subsequently, the observation site, is extracted by convergent charged particle beam working. This charged particle beam device is provided with a sample stage having a heating means and the small thermocouple, a manipulator for moving the small thermocouple, a reactive gas source for fixing the small thermocouple to the sample, and a cooling gas source for quickly cooling.
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