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The appearance survey instrument, appearance inspection manner and records the appearance check program the record media
The appearance survey instrument, appearance inspection manner and records the appearance check program the record media
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机译:外观测量仪器,外观检查方式及记录外观检查程序的记录介质
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摘要
PROBLEM TO BE SOLVED: To enable visual inspection without increasing the necessary amount of calculation and storage capacity even with heightening accuracy in positioning while preventing the occurrence of pseudo defects. ;SOLUTION: A device for visual inspection comprises an image differential part 2 of the inspection image and reference image of an object to be inspected, an image dividing part 3 to divide images, a pixel accuracy positioning part 4 to superimpose the inspection image on the reference image, a function fitting part 5 to fit a unimodal function to the density-variable value distribution of the absolute values of pixel values in a direction intersecting an edge at right angles, a computing part 6 of misregistration in sub-pixel accuracy, a modified differential image creating part 7 to create a modified differential image by rewriting pixel values so that the density- variable distribution of pixel values may follow the form of a unimodal function on a direction intersecting an edge at right angles on corresponding two edges, and an image comparing part 8 to compare the modified and divided differential image of the inspection image with the modified and divided differential image of the reference image on the basis of misregistration in sub-pixel accuracy to detect defects in the object to be inspected.;COPYRIGHT: (C)1999,JPO
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