CALIBRATION METHOD OF FILM THICKNESS MEASURING DEVICE, THE FILM THICKNESS MEASURING DEVICE AND CALIBRATION MEMBER

摘要

PROBLEM TO BE SOLVED: To simply and efficiently conduct calibration work for a device, as needed. ;SOLUTION: A substrate S is disposed right under a movable measuring head 2 disposed in a device body 1, an illuminating light is applied to the substrate S via an opening 1a for measurement and simultaneously the reflected light is received by the measuring head 2, and according to the reflected light, the film thickness of a thin film formed on the substrate S is measured. A calibration chip 9 (calibration member) is provided on the side of the opening 1a for measurement in the device body 1, the measuring head 2 is disposed above the chip 9 as needed, illuminating light is applied to the chip 9, and simultaneously its reflected light is received to obtain calibration data required for device calibration according to the reflected light. Information required for device calibration such as a test chart or the like is displayed on the chip 9.;COPYRIGHT: (C)2001,JPO