METHOD FOR TREATING SAMPLE FOR SURFACE ANALYSIS, SURFACE ANALYSIS METHOD, APPARATUS FOR TREATING SAMPLE FOR SURFACE ANALYSIS AND SURFACE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for treating a sample for surface analysis by applying treatment to the sample for surface analysis, before analyzing the surface of the sample, to remove carbon compounds remaining on the surface of the sample.;SOLUTION: Ozone gas treatment or ozone gas treatment and irradiation with ultraviolet rays are applied to the sample for surface analysis, before the analysis of carbon to remove carbon compounds adhering to the surface of the sample. Ozone gas treatment or ozone gas treatment and irradiation with ultraviolet rays are conducted in a treatment vessel, so as to prevent the contact of the surface of the sample with the atmosphere, and the cleaned state of the surface of the sample is evaluated through a nondestructive surface analysis method. The sample, to which these treatments are subjected is transferred to a final surface analyzer, so as not to generate adhesion of carbon and the surface of the sample is analyzed to accurately analyze the element in the surface of the sample.;COPYRIGHT: (C)2001,JPO