MEASURING DEVICE FOR WARPAGE OF FILM CARRIER TAPE FOR MOUNTING ELECTRONIC COMPONENT, AND MEASURING METHOD OF WARPAGE OF FILM CARRIER TAPE FOR MOUNTING ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a measuring device for warpage of a sample of a film carrier tape for mounting an electronic component and the measuring method of the warpage. ;SOLUTION: This method includes the step, where a sample S of a film carrier tape for mounting an electronic component is placed on a placement table 16, and while a warpage measuring part 11 is moved in the longitudinal direction to the table 16, a laser beam irradiated in the horizontal direction from a laser beam irradiation part 28 provided on one side of a measuring part support member 26 is shieled by the sample S, the height position of the uppermost part of the sample placed on the table 16 is measured by the height position of the laser beam, which does not reach a laser beam light-receiving part 30 provided on the other side of the member 26, and warpage of the film carrier tape is measured by a difference between this height position and the previously measured height position of the surface of the table 16.;COPYRIGHT: (C)2001,JPO