DATA DETECTOR EQUIPPED WITH A PLURALITY OF PROBES AND DATA-DETECTING METHOD BY A PLURALITY OF PROBES

摘要

PROBLEM TO BE SOLVED: To detect the data on the surface of a wide range of a sample at a high speed with high resolving power.;SOLUTION: In a data detecting apparatus or method by a plurality of probes 111, the probes 111 are integrated to relatively scan a sample 113 to detect the data on the sample 113. In this case, the positional relation of the tips of a plurality of the probes 111 is measured and stored and these measuring probes 111 are integrated to be changed in the relative angle with the sample 113 to relatively scan the sample 113 and the data obtained during relative scanning is synthesized from the control quantity of relative scanning, angle change quantity due to the change of the relative angle and the measured and stored positional relation of the tips of the probes.;COPYRIGHT: (C)2000,JPO