Gas purification equipment produces first free radicals from plasma generated between electrodes and secondary free radicals by electrons released photoelectrically from substrate

摘要

Gas purification equipment has electrode(s) and counter electrode(s) on a substrate adjacent a gas stream. A plasma is generated by a discharge between each electrode and counter electrode. The plasma generates free radicals to purify the gas. Secondary free radicals to purify the gas are produced by electrons released from the substrate due to a photoelectric action on the substrate. An Independent claim is included for the following: (a) Purifying a gas as above. Preferred Features: The discharge is produced by applying intermittent pulses between the electrodes and counter electrodes. The secondary free radicals are produced by irradiating the substrate with light - 50 nm and preferably 250 - 400 nm.