Method for performing measurements on positioning machines using triangularly arrayed support structures and pre-calibrated extendible measuring bars

摘要

Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.