Method of the scan type spot microscope and the Fourier spectrum analysis which use Fourier spectrum analysis

摘要

(57) Abstract Topic The scan type spot microscope which makes efficient measurement possible making use of the method of Fourier spectrum analysis is offered. Solutions The scan type spot microscope which does Fourier spectrum analysis the position where specimen 7 continues has the continual scan expedient 4 which scans incident light spot. In order for interferometer 8 to cross the optical path of the microscope, it is arranged, the said interferometer 8 as the double refraction device which is located between the polarized light devices is included, leads fixed optical path difference. Because there is an incident light spot from each position of the specimen 7 which it continues, the expedient 11 which absorbing light, records the light information is provided. As for fixed optical path difference, while executing each scan it is maintained uniformly, but during each scan it changes, value of the light information and the fixed optical path difference which it is related to the position of the result specimen becomes record possible.