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Possess various energy band gap quantum well formation the guided wave path forma optical component and its production manner
Possess various energy band gap quantum well formation the guided wave path forma optical component and its production manner
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机译:具备各种能带隙量子阱形成的导波路径形式的光学部件及其生产方式
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摘要
PROBLEM TO BE SOLVED: To provide an waveguide photoelement having at least exceeding two positions of regions with dissimilar energy band gap quantum well layer and its manufacture. SOLUTION: An InGaAs cap layer laminated on a quantum well layer 13, whereon at least exceeding a pair of InGaAs and InP layer is laminated after the formation of an SiO2 coating layer, is annealed at high temperature so as to form a band gap energy conversing region wherein the energy band gap in a specific region of the InGaAs/InP quantum well layer 13 is converted. Through these procedures, an waveguide photo element having dissimilar energy band gap quantum well layer laser-oscillating in different wavelength can be manufactured.
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