Emission efficiency control device and manufacturing method thereof, and an infrared sensor and a method of manufacturing the same with the emission efficiency control element

摘要

PURPOSE: To manufacture an emission efficiency controlling element easily, lower the driving voltage, make the size small, and improve the responsiveness by adjusting the voltage to be applied between a first electrode of a plate and a second electrode formed as beams and controlling the emission efficiency by altering the distance between the beams and the plate. CONSTITUTION: In the emission efficiency controlling element 9 of infrared sensor, an SiO2 layer 13 is formed as a spacer layer between a substrate 14 made of Si and a grating 12 (121 -12N) composed of a plurality of beams which can move up and down and both ends of each beam of the gratings 12 are supported by the spacer layer. Reflection films 15a, 15b made of Au are formed on the surface of the gratings 12 and the substrate 14. In the case where voltage is applied between the substrate 14 and the reflection film 15a, static electricity is generated and both ends of the grating 12 are sagged and the grating 12 touches the substrate 14. Consequently, the quantity of light of infrared-rays made incident on a piezoelectric body of an infrared-ray sensor can be changed by turning voltage to be applied to the element 9 on and off with the same function as that of a chopper.