STANDARD SAMPLE FOR ANALYSIS AND ITS DATA ACQUISITION METHOD AS WELL AS METHOD AND APPARATUS FOR X-RAY ANALYSIS BY USING STANDARD SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a standard sample, for an analysis, which can have a shape in which a plurality of metal substances are stuck as a single product and to provide its data acquisition method as well as to provide a method and an apparatus for an X-ray analysis by using the standard sample.;SOLUTION: Since the standard sample for the analysis has the shape in which the plurality of metal substances are stuck onto the same substrate, the standard sample, for the analysis, which has the shape in which the plurality of metal substances are stuck can be obtained as the single product. A part which has the shape in which the plurality of metal substances are stuck within the range of an analytical visual field is made to exist, it is moved in such a way that an area occupied by the part is changed, and the shape in which the plurality of metal substances are stuck is measured. Thereby, by the standard sample for the analysis as the single product, not only data on a plurality of stuck shapes but also data on the intermediate stuck shape of a plurality of samples can be acquired easily.;COPYRIGHT: (C)2002,JPO