WAVE FRONT ABERRATION ESTIMATING METHOD AND DEVICE, COMPUTER-READABLE STORAGE MEDIUM STORING WAVE FRONT ABERRATION ESTIMATING PROCEDURE, METHOD OF MANUFACTURING IMAGE FOCUSING OPTICAL SYSTEM AND IMAGE FOCUSING OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To enhance accuracy in estimation of a wave front aberration of an optical system to be inspected without changing hardware of a wave front measuring device.;SOLUTION: When estimating a wave front aberration of a predetermined area on a pupil of the optical system to be inspected, function fitting of applying a predetermined theoretical model is performed on wave front aberration data sampled from a certain area within the predetermined area. When a sampling object area of the wave front aberration data is limited in such manner, a wave front aberration of a portion other than the certain area of the predetermined area can be determined by extrapolative calculation and an influence on an estimation result by noise superimposed on the wave front aberration of the portion can be avoided.;COPYRIGHT: (C)2002,JPO