CONVERGENT LIGHT BRIGHT- AND DARK-FIELD MICROSCOPIC APPARATUS AND CONVERGENT LIGHT BRIGHT- AND DARK-FIELD MICROSCOPIC OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problems with observation with the conventional optical microscopic apparatus that only the microdefects and foreign matter are mainly observed and the relations with a large tissue structure cannot be exactly known and that a continuously delicate contrast cannot be imparted to the images to be observed.;SOLUTION: The optical microscopic apparatus having means 3 for irradiating convergent light, a table 5 to be loaded with the test article 6 just before a convergence point 4 of illumination light, an objective lens 10 arranged to once converge the illumination light transmitted through or reflected by the test article at the convergence point, then making this light incident on the lens, an element installed on a diffraction improving plane 8 orthogonal with an optical axis 7 of the illumination light including the convergence point to convert only the direct light incident in the point near the center of the diffracted image formed on the diffraction image plane without being diffracted or scattered by the test article to linearly polarized light and an analyzer 16 installed on the rear side of the objective lens in such a manner that the incident light can be converted to the linearly polarized light and that the plane of polarization can be rotated around the optical axis.;COPYRIGHT: (C)2002,JPO