DETECTION METHOD FOR SURFACE POTENTIAL, SURFACE POTENTIAL DETECTOR, AND SURFACE POTENTIAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a novel surface potential detector having a simple constitution, capable of surely detecting surface potential.;SOLUTION: A stationary electrode 16 is provided between an object K of surface potential measurement and a detection electrode 15, and the detection electrode 15 and the stationary electrode 16 are surrounded by an electromagnetic shield 10. With the stationary electrode 16, disposed opposite to the object K with a shield-less detection window 101 interposed between them, the impedance between shield potential and the stationary electrode 16 is made to change periodically.;COPYRIGHT: (C)2002,JPO