REDUCTION METHOD OF FLUORINE IN THERMAL DESORPTION GAS ANALYTICAL DEVICE CHAMBER AND THERMAL DESORPTION GAS ANALYTICAL METHOD

摘要

PROBLEM TO BE SOLVED: To reduce background of fluorine in a vacuum chamber in a thermal desorption gas analytical device.;SOLUTION: This method has at least a first step for evacuating the vacuum chamber up to the prescribed degree of vacuum (S01), a second step for placing a dummy sample having silicon oxide including carbon at the rate of several percent on a sample stage in the vacuum chamber (S02), a third step for heating the dummy sample to raise the temperature at a prescribed programming rate, and to desorb the carbon from the dummy sample (S03). The carbon in the dummy sample is desorbed in the vacuum chamber, reacted and bonded actively with fluorine remaining in the vacuum chamber to form CFx-based desorption gas, and desorbed from the inner wall of an analytical chamber. The desorbed CFx-based desorption gas is exhausted by a vacuum pump.;COPYRIGHT: (C)2001,JPO