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Micromachined fiber optic sensors

机译:微机械光纤传感器

摘要

A novel fiber optic sensor configuration whose diameter is the same as that of the optical fiber on which it is directly fabricated is introduced. A simple MEMS-compatible fabrication process to accomplish micromachining on the fiber end face has been developed and is detailed. This sensor configuration significantly reduces the size of the sensor and makes the packaging simple and adhesive free. The micromachining process of the present invention also provides for the fabrication of arrays of sensors that would provide two dimensional maps with high spatial resolution of at least one of acoustical vibration, mechanical vibration, pressure, temperature, acceleration, electrostatic fields, magnetic fields or combinations thereof.
机译:介绍了一种新颖的光纤传感器配置,其直径与直接在其上制造的光纤的直径相同。已经开发并详细介绍了一种简单的与MEMS兼容的制造工艺,可以在光纤端面上完成微加工。这种传感器配置显着减小了传感器的尺寸,并使包装简单且无粘合剂。本发明的微加工工艺还提供了传感器阵列的制造,该传感器阵列将提供具有高空间分辨率的二维图,该二维图具有声振动,机械振动,压力,温度,加速度,静电场,磁场或组合中的至少一种其。

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