Method for measuring a thermal expansion coefficient of a thin film by using phase shifting interferometry

摘要

The present invention disclose a method for measuring a thermal expansion coefficient of a thin film, in which the thin film is first deposited on two substrates having different thermal expansion coefficients under the same conditions. For each of the two deposited substrates, a relationship between the thin film stresses and the measuring temperatures is established by using a phase shifting interferometry technique, in which the stresses in the thin films are derived by comparing the deflections of the substrates prior to and after the deposition. Based on the two relationships the thermal expansion coefficient, and elastic modulus, $\mathop{\mathrm{image}}$ \frac{E_f}{\left(1-v_f\right)},$$;can be calculated, wherein E_f and &ngr;_f are the Young's modulus and Poisson's ratio of the thin film, respectively.