TOTAL-REFLECTION X-RAY FLUORESCENCE APPARATUS AND METHOD USING A DOUBLY-CURVED OPTIC

摘要

An improved total-reflection x-ray fluorescence (TXRF) apparatus using a doubly-curved optic is presented for use in detecting foreign matter on surfaces, for example, semiconductor wafers. The apparatus includes an x-ray source, a doubly-curved x-ray optic for diffracting and focusing the x-rays, a surface onto which at least some of the diffracted x-rays are directed, and an x-ray detector for detecting resultant x-ray fluorescence emitted by any foreign matter present on the surface. One or more apertures may be provided for limiting the dispersion angle of the x-rays. The crystal or multi-layer doubly-curved optic typically adheres to Bragg's law of x-ray diffraction may be curved to a toroidal, ellipsoidal, spherical, parabolic, hyperbolic, or other doubly-curved shape. An apparatus for diffracting x-rays is also presented. The apparatus includes an x-ray source and image defining an optic circle of radius R, an x-ray optic having a surface of radius RP and a plurality of atomic planes which intersect the surface at an angle α, wherein the radius of the atomic planes RP is defined by the equation RP = 2R cos α. This diffracting apparatus may be used in a TXRF apparatus.