Micro Gyroscope Fabricated by Single-crystalline Silicon Micromachining Technology

摘要

PURPOSE: A micro angular velocity indicator using a single crystal micromachining method is provided to increase the capacitance for enhancing resolution of a micro angular velocity indicator by using a single crystalline silicon as a micro structure. CONSTITUTION: An insulating layer is formed on whole surface of a structure of a fine angular velocity indicator. A conductive layer is formed on whole surface of the insulating layer. A metal layer is formed on a part of the conductive layer. A triple layer of the insulating layer/conductive layer/metal layer is formed on the whole surface of the structure of the fine angular velocity indicator. The structure of the fine angular velocity indicator is insulated by etching partially the conductive layer of the triple layer to separate the conductive layer. A spring constant and a resonance frequency are controlled by increasing or reducing thickness of the insulating layer and the thickness of the conductive layer.