/ USE OF SCATTERED AND/OR TRANSMITTED LIGHT IN DETERMINING CHARACTERISTICS INCLUDING DIMENSIONAL INFORMATION OF OBJECT SUCH AS PART OF FLAT-PANEL DISPLAY

摘要

this invention is a flat panel display of the object size and other information and characteristics of point scattering light and / or through the use of generalized system and method with a light, scattering light and / or through the flat panel display of the part (10) and a body (60). the the size of the information, including the characteristics, in order to be used, the size information of the objects in my opening (62) of average diameterthe opening of the average density of the object, and a layer (64) of the average thickness of the optical diffraction pattern, including the object, the cross line (140 and 142) change (146 and 148) and other characteristics, in order to determine to create features.