Integration polymeric arrayed waveguide grating wavelength multiplexer with photodetectors using GaAs substrate and a fabrication method

摘要

The present invention relates to an InGaAs photodetector polymer waveguide grating wavelength division column of the integrated structure on a single substrate, and the optical device manufacturing method using a GaAs substrate. The light detector is an integrated polymer waveguide heat grating wavelength division using a GaAs substrate according to the present invention an optical element shall 1xN, Nx1 or the input and output waveguides consisting of NxN, and the input plate waveguide for dispersing the optical signal entering via the input waveguide, wherein the dispersion the output plate waveguide to focus the optical signal, wherein the alignment between the two flat plate waveguide is integrated in the waveguide thermal grating and the output waveguide for transmitting a signal detecting the light intensity of each of the wavelength signals separated in the output waveguide and a photodetector. Then, when making those the present invention a polymer waveguide heat grating wavelength division optical element using a GaAs substrate proposed in, and possible to integrate the InGaAs photo-detector to an output waveguide region's polymer waveguide heat grating wavelength division optical element, Si a residual thermal stress party polymeric optical element it can be reduced compared with the case of using the substrate, thereby improving the performance of a device such as a polarization dependence.