Interferometer for determining test sample dimensions has reference mirror and receiver, which are laterally offset relative to the interferometer's optical axis

摘要

The device (4) is integrated into a tool (1) or mounted in a tool holder and has at least one light source (10) whose light is divided into reference and measurement beams. The measurement beam passes to a measurement point on the test object and the reference beam passes to a reference mirror. The reflected incoherent beams are recombined in the beam divider and passed to a receiver (13). The mirror and receiver are laterally offset from the measurement device's optical axis.