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Hierarchical process monitoring system identifies whether significant change of process conditions occurs as a result change in characteristics of certain self-inspecting sensor
Hierarchical process monitoring system identifies whether significant change of process conditions occurs as a result change in characteristics of certain self-inspecting sensor
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机译:分层过程监控系统可确定由于某些自检传感器的特性变化而导致过程条件是否发生重大变化
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摘要
A process monitoring unit (14) and sensors (SEVA 1-36) having self-inspection capability, are provided in the higher and lower levels of the monitoring system. The monitoring unit monitors output signals of the sensors and identifies every significant change of the process conditions, and determines whether the change occurs as a result of the change in characteristics of a certain sensor or due to actual change in process conditions. An Independent claim is also included for process monitoring unit.
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