PROCEDURES FOR THE DETERMINATION OF TYPE PROFILES IN THE DUNNING SCOPE

摘要

PCT No. PCT/EP97/05632 Sec. 371 Date Dec. 14, 1998 Sec. 102(e) Date Dec. 14, 1998 PCT Filed Oct. 13, 1997 PCT Pub. No. WO98/16948 PCT Pub. Date Apr. 23, 1998The invention relates to a method to determine depth profiles in an area of thin coating of solid substrates comprising the following steps: producing an ion beam with a substantial amount of ions having a molecular weight above 32 and consisting of at least 3 atoms; focusing the ion beam on the substrate surface whereby ions break down into two components upon impact and impact energy of the individual atoms or molecular fragments is sufficient for the removal of the upper coating as defined and interaction of particles bombarded by the solid body does not lead to a coating to be formed; removing defined surface coatings by an ionic beam sputter process; determining of concentration of sputtered components removed from the substrate surface by means of a measuring probe with a measuring and evaluation circuit connected downstream.