首页> 外国专利> DUMPED FILM, MEASUREMENT PROCEDURES FOR THIS FORM, PROCEDURES FOR MONITORING THE MANUFACTURING PROCEDURE, MANUFACTURING PROCEDURES, FORM PREPARATION AND SURVEILLANCE PROCEDURE

DUMPED FILM, MEASUREMENT PROCEDURES FOR THIS FORM, PROCEDURES FOR MONITORING THE MANUFACTURING PROCEDURE, MANUFACTURING PROCEDURES, FORM PREPARATION AND SURVEILLANCE PROCEDURE

机译:胶版纸,此表格的测量程序,制造程序的监视程序,制造程序,表格准备和监视程序

摘要

The invention provides a method of and an apparatus for measuring and controlling the position of an edge of a deposition film, positions and widths of deposition portions and margin portions, and positions of heavy edges without the need of a skilled operator. According to the invention, the deposition portions and the margin portions are formed in a stripe shape lengthwise and alternately widthwise by a margin forming apparatus and a metal deposition apparatus, and the resulting deposition film is irradiated with light from a light source while being run by a film transportation system. A line sensor camera detects a distribution of light transmittivity on the film in the widthwise direction of the film, and on the basis of the detected distribution of light transmittivity the position of an edge of the deposition film, positions and widths of the deposition portions and the margin portions, and positions of heavy edges are measured, and the margin forming apparatus and the metallic deposition apparatus are controlled on the basis of the resulting measurements. IMAGE
机译:本发明提供了一种无需技术人员就可以测量和控制沉积膜的边缘的位置,沉积部分和边缘部分的位置和宽度以及重边缘的位置的方法和设备。根据本发明,通过边缘形成装置和金属沉积装置在长度方向上和在宽度方向上交替地形成条状的沉积部分和边缘部分,并且在通过所得到的沉积膜的同时使来自光源的光照射。电影运输系统。线传感器照相机检测沿膜的宽度方向在膜上的透光率的分布,并且基于检测到的透光率的分布,沉积膜的边缘的位置,沉积部分的位置和宽度以及厚度。测量边缘部分和重边的位置,并根据所得到的测量结果来控制边缘形成设备和金属沉积设备。 <图像>

著录项

  • 公开/公告号DE69429648D1

    专利类型

  • 公开/公告日2002-02-21

    原文格式PDF

  • 申请/专利权人 TORAY INDUSTRIES INC.;

    申请/专利号DE19946029648T

  • 发明设计人 YATSUSHIRO TUGIO;TORIKAI JUN;

    申请日1994-06-23

  • 分类号C23C14/56;C23C14/54;

  • 国家 DE

  • 入库时间 2022-08-22 00:25:39

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