Low temperature synthetic manner null of the carbon nano tube which uses the catalytic converter metal membrane for carbon source gas resolution

摘要

A low-temperature synthesis method of carbon nanotubes using a metal catalyst layer. In the synthesis method, a metal catalyst layer is formed over a substrate. The metal catalyst layer is etched to form isolated nano-sized catalytic metal particles. Then, carbon nanotubes vertically aligned over the substrate are grown from every isolated nano-sized catalytic metal particle through thermal chemical vapor deposition, by decomposing a carbon source gas at a temperature equal to or lower than the strain temperature of the substrate using a carbon source gas decomposing metal catalyst layer.