METHOD FOR FORMING THICK FILM, METHOD FOR FORMING COLOR FILTER, METHOD FOR FORMING ARRAY SUBSTRATE WITH COLOR FILTER, DEVICE FOR FORMING THICK FILM, DEVICE FOR FORMING COLOR FILTER AND DEVICE FOR FORMING ARRAY SUBSTRATE WITH COLOR FILTER

摘要

PROBLEM TO BE SOLVED: To provide a device for forming an array substrate with a color filter by which the tapered angle at a pattern edge part of a thick resist layer that can be adjusted to a prescribed angle is formed.;SOLUTION: An inversely tapered red color filter 26r is heated at a suitable temperature to be softened by changing the distance between a COA (color filter on array) substrate and a hot plate. Since the color filter is softened by heating the COA substrate, a resist composition is softened or hardened by temperature and the inverse taper is corrected to a normal taper by the temperature of a softened area. A green color filter and a blue color filter are successively formed in a similar way.;COPYRIGHT: (C)2003,JPO