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HIGH PURITY CALCIUM FLUORIDE SINTERED COMPACT AND PRODUCTION METHOD THEREFOR
HIGH PURITY CALCIUM FLUORIDE SINTERED COMPACT AND PRODUCTION METHOD THEREFOR
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机译:高纯氟化钙烧结体及其生产方法
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摘要
PROBLEM TO BE SOLVED: To provide a high strength, inexpensive, high purity calcium fluoride sintered compact which has improved sintering properties without reducing its purity or rather improving the purity by utilizing the cut scraps of high purity calcium fluoride single crystals for an optical member, or the like, as the raw material, and is suitable as a plasma resistant member used in a semiconductor production process, particularly, a large-sized product or a member having a complicated shape, and to provide a production method therefor.;SOLUTION: The high purity calcium fluoride sintered compact having a purity of ≥99.0% and a density of ≥3.17 g/cm3 is obtained by using a production method wherein powder obtained by pulverizing calcium fluoride single crystal pieces as the raw material is sintered by a hot press.;COPYRIGHT: (C)2004,JPO
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机译:要解决的问题:为了提供一种高强度,廉价,高纯度的氟化钙烧结体,该烧结体通过将高纯度氟化钙单晶切碎的废料用于光学元件,可以提高烧结性能而不会降低其纯度,甚至不会提高纯度,作为原材料,并且适合用作半导体生产过程中使用的耐等离子部件,特别是大型产品或形状复杂的部件,并提供其生产方法。通过使用将氟化钙单晶片粉碎而得到的粉末的制造方法,可以得到纯度为99.0%以上,密度为3.17g / cm 3 Sup>的高纯度氟化钙烧结体。原材料是通过热压机烧结而成的;版权所有:(C)2004,日本特许厅
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