LIQUID MATERIAL DISCHARGE SYSTEM, METHOD FOR CONTROLLING DISCHARGE VOLUME OF LIQUID MATERIAL, AND ELECTRONIC PART PRODUCTION METHOD EMPLOYING CONTROL METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an apparatus which can lessen the burden on a skilled operator in a discharge apparatus of a liquid material and is capable of precisely adjusting the discharge volume even if a plurality of apparatus are simultaneously operated. ;SOLUTION: In an apparatus for controlling a discharge volume by image analysis, the discharge shapes of a liquid material photographed by a plurality of apparatus are controlled by independent image analysis apparatus and independently from setting of a variety of parameters to be carried out separately for the respective apparatus in the case of controlling the discharge volume, it is made possible to change these parameters based on the analysis results of the image analysis apparatus.;COPYRIGHT: (C)2003,JPO