METHOD FOR ADJUSTING RELATIVE ATTITUDE OF OBJECT TO BE MEASURED FOR SURFACE PROPERTIES MEASURING MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a method for adjusting the attitude of an object to be measured, having a feature region in a surface properties measuring machine. SOLUTION: The method for adjusting the relative attitude of the surface property-measuring machine for measuring the object to be measured, having a feature region comprises a step for positioning a detector in X- and Y-axis directions, and then for measuring a feature region along the X-axis direction; a step for determing the repetition of measurement being carried out, while the X-axis direction is being changed, a step for obtaining n feature points from n sets feature region data and obtaining a feature line from the feature points for obtaining the amount of correction in relative attitude; and a step for adjusting the attitude of the object to be measured based on the amount of realtive attitude correction, thus adjusting the feature region of the object to be measured in parallel with the Y axis.