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HIGH PURITY Co-Fe ALLOY SPUTTERING TARGET, MAGNETIC THIN FILM DEPOSITED BY USING SAME SPUTTERING TARGET AND METHOD FOR PRODUCING SAME HIGH PURITY Co-Fe ALLOY SPUTTERING TARGET
HIGH PURITY Co-Fe ALLOY SPUTTERING TARGET, MAGNETIC THIN FILM DEPOSITED BY USING SAME SPUTTERING TARGET AND METHOD FOR PRODUCING SAME HIGH PURITY Co-Fe ALLOY SPUTTERING TARGET
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机译:高纯度钴铁合金溅射靶材,使用相同溅射靶材沉积的磁性薄膜和制备相同高纯度钴铁合金溅射靶材的方法
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摘要
PROBLEM TO BE SOLVED: To provide a means for depositing a ferromagnetic film which has little leakage of gas and generation of particles on sputtering, has excellent corrosion resistance, and further has satisfactory magnetic properties.;SOLUTION: The high purity Co-Fe alloy sputtering target has an oxygen content of ≤30 ppm, and Al, Si and Cu contents respectively of ≤30 ppm. The magnetic thin film is deposited by using the same sputtering target.;COPYRIGHT: (C)2003,JPO
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