Method for measuring particle size of inclusion in metal by emission spectrum intensity of element constituting inclusion in metal, and method for forming particle size distribution of inclusion in metal, and apparatus for executing that method

摘要

An electron probe microanalyzer determines the particle size of intermetallic inclusions in a master while scanning an area of &phgr;5 mm located at an arbitrary location on the surface of the master. A calibration curve representative of the relationship between the particle size of intermetallic inclusions and the emission spectrum intensity of an constituent element constituting intermetallic inclusions is generated based on the determined particle size of the intermetallic inclusions. Intermetallic inclusions existing on emission spots on the surface of a test sample are specified based on data of emission spectrum intensity of an element existing on the emission spots, and a particle size of the specified intermetallic inclusions is determined based on the data of emission spectrum intensity and the generated calibration curve.