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Method for beam control in a scanning microscope, arrangement for beam control in a scanning microscope, and scanning microscope

机译：在扫描显微镜中进行光束控制的方法，在扫描显微镜中进行光束控制的装置以及扫描显微镜

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摘要

A method and an arrangement for beam control in a scanning microscope are disclosed. The scanning microscope comprises means for acquiring and displaying (3) a preview image (7) and a microscope optical system (51). Means for marking (5) at least one region of interest (27, 29) in the preview image (7) are provided. A first beam deflection device (43, 67, 68) displaces the scan field (31, 33) onto the region of interest (27, 29); and a second beam deflection device (49, 72, 94) serves for meander-shaped scanning within the scan field (31, 33).

机译：公开了一种用于在扫描显微镜中进行光束控制的方法和装置。扫描显微镜包括用于获取和显示（ 3 ）预览图像（ 7 ）和显微镜光学系统（ 51 ）的装置。提供了一种用于在预览图像（ 7 ）中标记（ 5 ）至少一个感兴趣区域（ 27、29 ）的方法。第一光束偏转装置（ 43、67、68 ）将扫描场（ 31、33 ）移到感兴趣区域（ 27、29 >）;第二束偏转装置（ 49、72、94 ）用于在扫描场（ 31、33 ）内进行曲折形扫描。 展开▼

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公开/公告号US6580554B2

专利类型

公开/公告日2003-06-17

原文格式PDF

申请/专利权人 LEICA MICROSYSTEMS HEIDELBERG GMBH;
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申请/专利号US20010974014

发明设计人 JOHANN ENGELHARDT;WERNER KNEBEL;
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申请日2001-10-10

分类号G02B210/00;

国家 US

入库时间 2022-08-22 00:07:07

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3. Method for beam control in a scanning microscope, arrangement for beam control in a scanning microscope and scanning microscope [P] . 德国专利： DE10050529B4 . 2016-06-09

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