Electrostatic actuator, method of producing electrostatic actuator, micropump, recording head, ink jet recording apparatus, ink cartridge, and method of producing recording head

摘要

An electrostatic actuator includes a diaphragm caused to vibrate by electrostatic force, an electrode substrate opposing the diaphragm, an electrode formed on the electrode substrate so as to oppose said diaphragm with a gap being formed between the electrode and the diaphragm, an anti-corrosive thin film formed on said diaphragm, and diaphragm deflection prevention means preventing the diaphragm from deflecting.