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A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems
A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems
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机译:具有加强支撑梁的微机电装置以及在记忆体中形成加强支撑梁的方法
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摘要
A microelectromechanical device (MEMD) defined within a substrate of a MEMS includes a mass element defining an area of interest. The device also includes a support beam supporting the mass element in spaced-apart relationship from the substrate. The support beam includes a first beam member defined by a first fixed end connected to the substrate, and a first free end connected to the mass element. The support beam further includes a second beam member defined by a second fixed end connected to the substrate, and a second free end connected to the mass element. The beam members are in spaced-apart relationship from one another. A first cross member connects the first beam member and the second beam member. Preferably, the support beam includes a plurality of cross members. Two such support beams can be used to support a mass element in a MEMD in a bridge configuration.
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