FABRICATION OF A HIGH RESOLUTION BIOLOGICAL MOLECULE DETECTION DEVICE WITH ALUMINUM ELECTRICAL CONDUCTORS

摘要

The present invention relates to a method of manufacturing a detection device which involves providing a substrate having a layer of aluminum and a first layer of photosensitive material. Next, the substrate is subjected to a first level photolithography treatment to produce an aluminum electrical conductor containing conductive fingers with spaces between them. Finally, biological probes are attached to the conductive fingers under conditions effective to form a gap between the biological probes on the spaced apart conductive fingers. As a result, a target molecule, if present in a sample, can bind to a pair of the biological probes on the spaced apart conductive fingers to bridge the gap between the biological probes, allowing detection of the target molecule.