3 NOVEL THREE DIMENSIONAL TOPOGRAPHIC IMAGE TECHNOLOGY IN SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE: A method and an apparatus for forming three-dimensional images of a scanning electron microscope are provided to form the three-dimensional images by installing a predetermined filter in a general scanning electron microscope. CONSTITUTION: An electron gun(110) is installed at an end portion of a scanning electron microscope(100) in order to accelerate condensed electron beam(10) and transmit the condensed electron beam(10) to a sample. A reverse electromagnetic filed filter(130) is installed at a lower side of the electron gun(110). The reverse electromagnetic filed filter(130) is used for deflecting the electron beam(10) condensed through an object lens(120) as much as a predetermined angle. A correction lens(150) is installed at a lower side of the reverse electromagnetic filed filter(130). The correction lens(150) is used for deflecting the deflected electron beam(10) to a center axis A.