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Aqueous dispersion used for chemical-mechanical polishing of oxide surface, preferably silica, contains pyrogenic silica powder doped with alumina from aerosol with specified particle size
Aqueous dispersion used for chemical-mechanical polishing of oxide surface, preferably silica, contains pyrogenic silica powder doped with alumina from aerosol with specified particle size
In aqueous dispersion for chemical-mechanical polishing of oxide surfaces, containing a powder of pyrogenic silica doped with alumina by means of an aerosol, the powder contains 0.01-3, preferably 0.2-1.5 weight percent (wt.%) alumina and the average particle diameter of the dispersion is not more than 0.1 microns. An Independent claim is also included for production of the dispersion by dispersing the doped silica in an aqueous medium with an energy input of not less than 200 kJ/m3.
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机译:在用于化学机械抛光氧化物表面的水分散体中,其包含通过气溶胶掺杂有氧化铝的热解二氧化硅粉末,该粉末包含0.01-3重量%,优选0.2-1.5重量%(wt。%)的氧化铝和平均颗粒。分散液的直径不大于0.1微米。通过将掺杂的二氧化硅分散在能量输入不小于200kJ / m 3的水性介质中来制备分散体也包括独立权利要求。
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机译: (54)标题:具有硅酸盐涂层的固体颗粒(54):FESTKoRPERPARTKEL MIT SILKATBESCHICHTUNG(57)摘要:本发明涉及一种具有二氧化硅涂层的固体颗粒的生产方法,其包括以下步骤:将固体颗粒分散为将其涂覆在水性介质中以产生固体颗粒分散体,通过缓冲系统调节固体颗粒分散体的pH以产生缓冲的固体颗粒分散体,并向缓冲的固体颗粒分散体中添加碱性硅酸盐溶液以形成二氧化硅在涂覆期间将其涂覆在固体颗粒上,其中选择缓冲体系和碱性硅酸盐溶液的量,使得在添加碱性硅酸盐溶液之前和在添加完成之后,缓冲的固体颗粒分散体的pH至少为7.0。碱性硅酸盐溶液的最大含量为11.0。固体颗粒优选是无机固体,特别是