MEASURING APPARATUS OF ROTATOR SURFACE FORM AND MEASURING APPARATUS OF OPTICAL DISK SURFACE FORM

摘要

PROBLEM TO BE SOLVED: To provide a measuring apparatus of a rotator surface form and a measuring apparatus of an optical disk surface form which can measure a deformed shape of a rotator by improving the moire topography method and the stereo method so that they may be suitable for rotator measurement.;SOLUTION: The measuring apparatus of a rotator surface form is provided with a photographing and recording device which installs a stated fixed form pattern on a rotator, photos and records the installed fixed form pattern image, an arithmetic unit for calculating the degree of deformation of a photoed fixed form pattern, a lighting device for illuminating the fixed form pattern in a strobe shape synchronizing with the rotation of the rotator from backward the fixed pattern, and a projector for projecting the pattern image on the rotator surface.;COPYRIGHT: (C)2004,JPO