The resolution central processing unit of vapor condition organicity halogen compound, and resolution central processing unit null of the liquid condition organicity halogen compound which applies this

摘要

PROBLEM TO BE SOLVED: To provide a decomposition treatment device of gaseous organic halogen compound and a decomposition treatment device of liquid organic halogen compound provided with the same device. ;SOLUTION: This decomposition treatment device of gaseous organic halogen compound is provided with a gas introducing means which guides a gaseous organic halogen compound to a thermal decomposition means, the thermal decomposition means which generates decomposition gas by subjecting the gaseous organic halogen compound to the contact thermal decomposition with a heat generator and subjecting the gaseous organic halogen compound to the thermal decomposition due to radiation heat and a gas discharging means which supplies the gaseous organic halogen compound to the thermal decomposition means via the gas introducing means and discharges the decomposition gas which is generated by thermally decomposing the gaseous organic halogen compound in the thermal decomposition means from the thermal decomposition means. Further, this decomposition treatment device of liquid organic halogen compound has a constitution which consists of the decomposition treatment device of gaseous organic halogen compound and a gasification means which gasifies liquid organic halogen compounds.;COPYRIGHT: (C)2003,JPO