OPTICAL WAVEGUIDE TYPE SURFACE PLASMON RESONANCE SENSOR AND OPTICAL WAVEGUIDE TYPE SURFACE PLASMON RESONANCE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide type surface plasmon resonance device having a portable size and an optical waveguide type plasmon sensor, which is mass-producible and low in price.;SOLUTION: The sensor measures changes in the dielectric constant of a material to be measured with a surface plasmon on the surface of a thin metal film 14 in contact with the measured material. The sensor includes: a transparent substrate 10, wherein a first main surface 10a thereof is in contact with the back surface of the thin metal film 14, a light entered from a second main surface 10b enters into the back surface of the thin metal film 14 at a predetermined incident angle θ, the light reflected at the back surface of the thin metal film 14 exits from the second main surface 10b; an incoming grating 12a arranged at both sides of the thin metal film 14 in contact with the first main surface 10a for diffracting the light before the light enters into the back surface of the thin metal film 14; an outgoing grating 12b for diffracting the light after the light is reflected at the back surface of the thin metal film 14; and a protective film 11 provided in contact with the first main surface 10a so as to cover both incoming grating 12a and outgoing grating 12b.;COPYRIGHT: (C)2004,JPO&NCIPI