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Near magnetic field probe and the near magnetic field probe unit and near magnetic field probe array and magnetic field measurement system
Near magnetic field probe and the near magnetic field probe unit and near magnetic field probe array and magnetic field measurement system
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机译:近磁场探头及近磁场探头单元,近磁场探头阵列及磁场测量系统
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摘要
PROBLEM TO BE SOLVED: To reduce measuring errors by preventing, using simple constitution, the interlinkage of a magnetic field from a measured part to the extension wire part of a near magnetic field probe which is brought close to the subject of measurement to detect a magnetic field. ;SOLUTION: In a near magnetic field probe 1, which has on a substrate 2a coil 3 comprising one turn of winding made of a conductive thin film or a plurality of turns of windings with insulating layers between them, an extension wire 4 from the coil 3, and a pad 5 to which the extension wire 4 is connected, the extension wire 4 is provided with a conductive thin film 7 for use as a shield, with an insulating layer 6 between them. Thus, by providing the shield layer made of the conductive thin film 7 on the extension wire 4, errors caused by the interlinkage of magnetic flux to the extension wire are reduced to enable measurements of higher accuracy.;COPYRIGHT: (C)1998,JPO
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