Electric heater for the exhaust gas treatment tower and the processing tower of semiconductor exhaust gas processing equipment

摘要

PROBLEM TO BE SOLVED: To develop an exhaust gas treating tower to ensure insulation ability of the feed part of an electric heater used in an exhaust gas decomposition treating chamber when high temperature thermal decomposition reaction of semiconductor exhaust gas is effected, relieve a load during energization of the electric heater as much as possible, and besides minimize a heat loss.;SOLUTION: The semiconductor exhaust gas treating device comprises (a) an exhaust gas treating tower body (3) having an exhaust gas decomposition treating chamber (1a) formed at an internal part; (b) a body bottom part (4) mounted on the bottom of the exhaust gas treating tower body (3); (c) a gas feed pipe (6) inserted in the body bottom part (4) and erected in the exhaust gas treating tower body (3), and discharging exhaust gas (F) from its tip into the exhaust gas decomposition treating chamber (1a); and (d) an electric heater (7) having a feed part (8b) disposed in the body bottom part (4) and erected from the body bottom part (4).;COPYRIGHT: (C)2002,JPO