Optical disc for blank master, a method for producing stamper for optical disc, optical disc manufacturing method

摘要

PURPOSE: To produce a blank master capable of forming a satisfactory stepped pattern without waving the surface and to produce a glass master. ;CONSTITUTION: When a 1st resist layer 12, a middle layer 14 and a 2nd resist layer 16 are successively laminated on a glass substrate 10, positive type resists having the same compsn. are used as the resists of the 1st and 2nd resist layers 12, 16 and a PVA film of 15-50nm thickness is formed as the middle layer 14. At the time of development, the development of the 2nd resist layer 16 and the middle layer 14 proceeds first and then the development of the 1st resist layer 12 starts, accordingly a stepped pattern having a sectional shape with two steps different from each other in width is formed at the end of development.;COPYRIGHT: (C)1996,JPO