Measuring method and the measurement equipment of aspheric surface form and the optical component production mannered null parallel

摘要

PROBLEM TO BE SOLVED: To measure aspherical shape in a short time without using an aspherical standard. ;SOLUTION: An aspherical reference surface 2 having shape accuracy as exhibiting interference fringes according to the aspherical shape of a measuring surface 1 is produced, an aspherical wave surface 3 is produced and non- spherical surface interference measurement in a large area is conducted in a short time. The aspherical reference surface 2 is an aspherical surface optical element 10 produced by utilizing a flycut or ELID grinding, which forms interference fringes from the reflection light from the aspherical shape and specified reference light to measure the spherical surface by interference. The aspherical surface optical element is desired to be an aspherical reflection mirror reflecting parallel light in the normal direction of the measuring surface with the accuracy of shape as exhibiting interference fringes.;COPYRIGHT: (C)2000,JPO